AMLCI Clean Room and Prototyping Facility
Address: Liquid Crystals Materials Science Building, 380A| 1425 Lefton Esplanade Kent, OH 44242
Phone: 330-672-2654
Email: amlci@kent.edu
Phone: 330-672-2654
Email: amlci@kent.edu
Hours
By appointment
The AMLCI Clean Room and Prototyping Facility (AMLCICRPF) is a cross-disciplinary center. The facility offers an excellent location for students, various companies, and technical organizations to carry out research activities. The facility consists of tools for device fabrication (e.g., liquid crystal display) with a range of equipment, such as reactive ion etch, metal evaporation systems (DC and RF sputter, e-beam, thermal), atomic layer desposition (ALD) wet chemical stations, photolithography, and surface analysis tools.
Equipment, Features, and Services
- Lithography Equipment
- Thermal Process Equipment
- Thin Film Coating/Deposition
- Wet Process (Surface Chemistry)
- Post Process Metrology
- Plasma Etching
- Microprinters
- Liquid Crystal Device Assembly